Nanopatterning by Laser Interference Lithography: Applications to Optical Devices
نویسندگان
چکیده
منابع مشابه
Nanopatterning by laser interference lithography: applications to optical devices.
A systematic review, covering fabrication of nanoscale patterns by laser interference lithography (LIL) and their applications for optical devices is provided. LIL is a patterning method. It is a simple, quick process over a large area without using a mask. LIL is a powerful technique for the definition of large-area, nanometer-scale, periodically patterned structures. Patterns are recorded in ...
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ژورنال
عنوان ژورنال: Journal of Nanoscience and Nanotechnology
سال: 2014
ISSN: 1533-4880,1533-4899
DOI: 10.1166/jnn.2014.9199